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【Msensor Sensor】MEMS accelerometer and piezoelectric ceramic accelerometer
MEMS accelerometers and piezoelectric ceramic accelerometers
MEMS sensors, or Microelectro Mechanical Systems, are a cutting-edge interdisciplinary research field developed based on microelectronics technology. After more than forty years of development, it has become one of the major technological fields attracting global attention.
Here we mainly talk about vibration MEMS accelerometers. There are several types of MEMS accelerometers as follows: piezoresistive micro-accelerometers, capacitive micro-accelerometers, torsional micro-accelerometers, and tunnel micro-accelerometers.
Main advantages of MEMS accelerometers: small size, light weight, low power consumption, high reliability, high sensitivity, and ease of integration.
Current status of MEMS accelerometers: Currently, some low-end applications can use domestic products, but high-end industrial applications still differ significantly from foreign products. This is mainly reflected in frequency response range, noise ratio, resolution, etc.
The main working principle of piezoelectric ceramic sensors is the direct piezoelectric effect. The charge generated due to external force can only be preserved when the circuit has infinite input impedance, which does not actually exist. Therefore, piezoelectric ceramic sensors can only be used to measure or sense dynamic or quasi-static stress.
The advantages of piezoelectric sensors include wide frequency band, high sensitivity, high signal-to-noise ratio, simple structure, reliable operation, and light weight. Piezoelectric crystals can operate at temperatures above 400°C for long periods, and can withstand instantaneous (10 milliseconds) shock temperatures above 4000K. They can endure very high surface pressure (>150N/mm²), have high stiffness, good linearity, low hysteresis, constant sensitivity over a wide temperature range, wide frequency response range, and can withstand almost infinite load cycles, with very high insulation resistance.
Comparison between MEMS accelerometers and piezoelectric ceramic accelerometers: 1. Piezoelectric ceramics have a wider frequency response range. 2. MEMS perform better at low frequencies. 3. For the same performance, piezoelectric ceramics are cheaper. 4. MEMS have better consistency.
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